Ambient-Processable High Capacitance Hafnia-Organic Self- Assembled Nanodielectrics

Ken Everaerts,† Jonathan D. Emery,‡ Deep Jariwala,‡ Hunter J. Karmel,‡ Vinod K. Sangwan,‡ Pradyumna L. Prabhumirashi,‡ Michael L. Geier,‡ Julian J. McMorrow,‡ Michael J. Bedzyk,‡,∥ Antonio Facchetti,*,†,⊥ Mark C. Hersam,*,‡,†,§ and Tobin J. Marks

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